| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means which keeps the discharge function of an application nozzle always at normal conditions and improves an equipment utilization or a production efficiency. <P>SOLUTION: An ultrasonic cleansing portion 140 and a solvent atmosphere chamber 142 are arranged side by side near an application processing portion. When a nozzle portion 120a of a resist nozzle 120 is inserted into an opening 188a of a cover 188 in a washing tub 164, a lower end portion (a section near an outlet) of the nozzle portion 120a inside the washing tub 164 is soaked in a thinner bath charged with ultrasonic waves from an ultrasonic-transducing box body 166. In the solvent atmosphere chamber 142, thinner S overflowing through a notch 170a provided on an upper end portion of a partition 170 from the washing tub 164 of the ultrasonic cleansing portion 140 is introduced into a solvent reservoir 192, and when the solvent reservoir 192 comes filled up, overflows and falls down to a drain groove 196. The drain groove 196 is washed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
