发明名称 ELEMENT MANUFACTURING METHOD
摘要 The present invention provides an element manufacturing method. An element manufacturing method according to the present invention includes: a first step for obtaining a thickness distribution in a surface direction of a workpiece 100; a second step for calculating a processing-amount distribution from the difference between the thickness distribution and a desired film-thickness distribution; a third step for locally processing the workpiece according to the processing-amount distribution; a fourth step, following the third step, for segmenting the inside of the surface of the workpiece into a plurality of element sections and forming an electrode in each of the element sections; and a fifth step for dividing each of the plurality of element sections to form a plurality of elements.
申请公布号 WO2016158965(A1) 申请公布日期 2016.10.06
申请号 WO2016JP60158 申请日期 2016.03.29
申请人 KYOCERA CORPORATION 发明人 WATANABE, Keiichiro
分类号 H03H3/02;H01L41/29;H01L41/332;H01L41/338 主分类号 H03H3/02
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