EXPOSURE DEVICE AND EXPOSURE METHOD

摘要

Provided are an exposure device and an exposure method which allow high efficiency and extended lifespan of a spatial light modulator to be achieved. An exposure device (100) is provided with: a microlens array (142) where an array of microlenses for collecting light from a light source are disposed; a spatial light modulation element (digital micromirror device) (12) where pixels for modulating the light collected by the microlens array (142) are disposed; a first focusing optical system (143) for focusing the light collected by the microlens array (142) onto the spatial light modulation element (12); and a second focusing optical system (16) for focusing the light modulated by the spatial light modulation element (12) onto a photosensitive material.