发明名称 |
COMPLIANCE PARTITIONING IN TESTING OF INTEGRATED CIRCUITS |
摘要 |
<p>Probecard architectures partition the spring compliance required for IC testing between several different components. Such architectures can provide shorter springs, better impedance control, improved power/ground distribution and more direct paths to tester electronics. The probecards can also use thinner interconnector substrates to conform to the planarity of a DUT and may suspend such a substrate by wires attached to a perimeter edge of the substrate to permit the substrate to tilt. Tilting can also be facilitated by positioning tester-side springs away from the perimeter of the substrate. Low compliance MEMS probes for such architectures can be provided on replaceable coupons having attachment points away from electrical connections, and a method for fabricating probe springs can plate spring material on a membrane deformed by contact with a bumped substrate.</p> |
申请公布号 |
WO2008033428(A2) |
申请公布日期 |
2008.03.20 |
申请号 |
WO2007US19863 |
申请日期 |
2007.09.12 |
申请人 |
INNOCONNEX, INC.;MOK, SAMMY;SWIATOWIEC, FRANK;AGAHDEL, FARIBORZ |
发明人 |
MOK, SAMMY;SWIATOWIEC, FRANK;AGAHDEL, FARIBORZ |
分类号 |
B23K31/02;C23C26/00;G01R31/26;H05K3/30 |
主分类号 |
B23K31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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