RADIOFREQUENCY PLASMA GENERATION DEVICE

摘要

The invention proposes a device (110) comprising two plasma generation electrodes (103, 106), a series resonator having a resonant frequency above 1 MHz and comprising a capacitor (111) provided with two terminals, and an induction coil (112) surrounded by a screen (132), the capacitor and the coil being placed in series, the electrodes being connected to the respective terminals of the capacitor, the device being characterized in that the ratio of the spark plug to the radius of the screen is equal to 0.56. The invention makes it possible to optimize the Q-factor of such a device by adjusting the radius of the coil (112) to that of the screen (132).