| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chamber apparatus that can form an electrostatic latent image on a photoreceptor by irradiating the photoreceptor with a charged particle beam, measure the photoreceptor formed with the latent image, in a short time and measure the state of the photoreceptor nondestructively with high resolution, and provide an electrostatic latent image forming apparatus, an electrostatic latent image measuring apparatus, a photoreceptor event generating apparatus, an apparatus capable of measuring an event on the surface of the photoreceptor in time sequence, etc.. SOLUTION: The vacuum chamber apparatus comprises a vacuum chamber and a scanning optical system. A sample stage for locating a sample in a predetermined position is provided in the vacuum chamber, and an operating part of the sample stage is provided under atmospheric pressure of the outside in contact with the vacuum chamber. The sample placed on the sample stage is located in the predetermined position in a high vacuum by the operating part. The scanning optical system is provided independently of the vacuum chamber, and scanning light from the scanning optical system enters from an aperture provided in the shoulder part of the vacuum chamber. The sample in the vacuum chamber is scanned by a deflecting scanning means of the scanning optical system. COPYRIGHT: (C)2009,JPO&INPIT
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