| 摘要 |
PROBLEM TO BE SOLVED: To obtain a natural angular frequency of an oscillation mode with an integer multiple of reference frequency, in an oscillator device having a plurality of oscillation modes. SOLUTION: The oscillator device includes a plurality of oscillators 101, 102, and a plurality of torsion springs 111, 112. The device has at least a first oscillation mode and a second oscillation mode, and the frequency of the second oscillation mode is an integer multiple of the frequency of the first oscillation mode. A drive means 120 drives the oscillators 101, 102 to oscillate at the first and second oscillation modes, simultaneously. A natural angular frequency calculation means 151 calculates the natural angular frequency of the second oscillation mode on the basis of the timing when the light 133 reflected from the oscillators 101, 102 passes a photodetector 140. COPYRIGHT: (C)2009,JPO&INPIT
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