Sensor element manufacturing method for measuring oxygen concentration in ambient air, involves selecting location of diffusion barrier based on value of determined diffusion resistance, where abrasion process is carried out at location

摘要

The method involves removing a material of a diffusion barrier (41) step by step for adjusting a diffusion resistance of the barrier. The diffusion resistance is subsequently determined by heating a sensor element (10). A voltage lying between electrodes (31, 32) is selected such that an electrical pump current represents a diffusion limited current of the sensor element. A location of the diffusion barrier is selected based on a value of the determined diffusion resistance, where an abrasion process is carried out at the location.