ADSORPTION DEVICE AND CONTROL METHOD THEREOF

摘要

The present invention provides an adsorption device and a control method thereof. The adsorption device includes a loading module, a power supply module, a temperature detection module and a voltage control module, wherein the loading module is used for adsorbing and loading a substrate, the power supply module is used for applying a DC voltage to the loading module to enable the loading module to generate an adsorption force, the temperature detection module is used for detecting the temperature of the loading module, and the voltage control module is used for controlling the DC voltage applied to the loading module from the power supply module according to the temperature detected by the temperature detection module, so as to keep the adsorption force as a constant value.

主权项

1. An adsorption device, comprising a loading module, a power supply module, a temperature detection module and a voltage control module, wherein
the loading module is used for adsorbing and loading a substrate; the power supply module is electrically connected to the loading module and is used for applying a DC voltage to the loading module to enable the loading module to generate an adsorption force; the temperature detection module is coupled to the loading module and is used for detecting the temperature of the loading module; the voltage control module is respectively coupled to the power supply module and the temperature detection module and is used for controlling the DC voltage applied to the loading module from the power supply module according to the temperature detected by the temperature detection module, so as to keep the adsorption force as a constant value.