发明名称 LEAK DETECTOR AND METHOD FOR DETECTING LEAKS
摘要 The invention relates to a leak detector (1) for detecting leaks of an object to be tested (A) by detecting a tracer gas, the leak detector (1) including: a gas inlet (2); a pumping device (4); a pumping pipe (3) connecting the gas inlet (2) to the pumping device (4); a device for detecting tracer gas (6) mounted on the pumping pipe (3), as a bypass of the pumping device (4), the device for detecting tracer gas (6) comprising: a probe (12) configured to ionise the molecules of gas and to measure the current of the ionised gas molecules, and a separating membrane (8) arranged upstream of the probe (12), characterised in that the separating membrane (8) is a monoatomic layer of graphene (9) deposited on a gas-pervious substrate (11) of the device for detecting tracer gas (6), selection openings (10) in which the largest dimension (D) is smaller than 5 angstroms being arranged in the monoatomic layer of graphene (9) so that only the gas molecules that have smaller dimensions than the selection openings (10) can pass through the separating membrane (8) to reach the probe (12). The invention also relates to a method for detecting leaks.
申请公布号 WO2016150690(A1) 申请公布日期 2016.09.29
申请号 WO2016EP54808 申请日期 2016.03.07
申请人 PFEIFFER VACUUM 发明人 DUCIMETIERE, Laurent;PUECH, Michel;ROUVEYRE, Frédéric
分类号 G01M3/20 主分类号 G01M3/20
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