SYSTEM HAVING A PROCESS CHAMBER FOR WORKPIECES

摘要

The invention relates to an installation having a process chamber which comprises an inner space having a receiving region for workpieces. The process chamber has an opening for the supply or discharge of workpieces. The process chamber is constructed so as to have a device for the introduction of gaseous fluid into the inner space, which device has at least one nozzle or aperture for the production of a fluid stream curtain between the opening and the receiving region for workpieces. The process chamber has a device for supplying fresh air, with which device fresh air can be introduced into the receiving region at a side of the fluid stream curtain, which side faces away from the opening.

主权项

1. An installation comprising:
a process chamber including an inner space defining a receiving region for workpieces; an opening for supplying or discharging said workpieces; a blowing arrangement for blowing a gaseous fluid into said inner space; said blowing arrangement including a nozzle or orifice for generating a fluid flow curtain between said opening and said receiving region; said flow curtain having a side facing away from said opening; a fresh air supply unit for introducing fresh air into said receiving region on said side of said fluid flow curtain; and, said flow curtain being adapted to provide a constant fresh air volume flow into said inner space.