LASER INDUCED PLASMA MICROMACHINING (LIPMM)

摘要

A system for laser-induced plasma micromachining of a work-piece includes a dielectric fluid, a dielectric fluid supply device, a laser, a processor, and a memory. The dielectric fluid supply device is arranged to hold a work-piece in the dielectric fluid or to direct the dielectric fluid onto the work-piece. The laser is arranged to emit a pulsed laser-beam. The processor is in electronic communication with the laser. The memory is in electronic communication with the processor. The memory includes programming code for execution by the processor. The programming code is programmed to direct the laser to deliver the pulsed laser-beam into the dielectric fluid to create a plasma generated at a focal point of the pulsed laser-beam in the dielectric fluid to micromachine, using the plasma, the work-piece disposed adjacent to the focal point.

主权项

1. A method of micromachining a work-piece comprising:
emitting a laser-beam from a laser into a dielectric fluid thereby creating a plasma at a focal point of the laser-beam in the dielectric fluid; and micromachining, using the plasma, a work-piece disposed adjacent to the focal point.