| 摘要 |
A pre-sorting device of a substrate converting a port mode, and a pre-storing method of a substrate using the same are provided to reduce a transfer load of a stocker cassette by flexibly switching functions of a From-port and a To-port. A stocker(110) stores a plurality of cassettes. A From-Ports(130,140) and a plurality of To-Ports(150,160,170) are formed at one side of the stocker to receive cassettes, and can switch modes therebetween. A sorting robot(180) takes a substrate out of the From-Ports, and selectively transfers the substrate to any one of the To-Ports according as a defect occurs or not. A control PC(Personal Computer) conrols an operation of the sorting robot. |
