发明名称 |
Thermostat and testing machine provided with the same |
摘要 |
A thermostat (1) includes a plate body (2), a heat insulator (3), and an electric heater (5). The plate body (2) defines a cavity (8) therewithin. The plate body (2) has on its bottom two openings (11) and (12), which communicate with the cavity (8) and function as a cooling medium inlet and a cooling medium outlet, respectively. The outer periphery of the plate body (2) is covered with the heat insulator (3). That prevents heat intrusion and/or dissipation from the outer periphery of the plate body (2) in transferring heat between the mounting face (7) and a heat transfer medium within the cavity (8). That reduces the thermal influence on the mounting face (7), thereby ensuring more uniform temperature distribution on the mounting face (7).
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申请公布号 |
EP1968352(A1) |
申请公布日期 |
2008.09.10 |
申请号 |
EP20080003656 |
申请日期 |
2008.02.28 |
申请人 |
ESPEC CORP. |
发明人 |
NAKANISHI, MASATAKA;KURARA, HIRONOBU;NISHIKAWA, TAIHEI |
分类号 |
H05B1/02;H01L21/00;H05B3/68 |
主分类号 |
H05B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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