| 摘要 |
PROBLEM TO BE SOLVED: To provide an application device, a substrate delivery method and an application method for reducing cost during use. SOLUTION: In this substrate delivery method, a substrate can be easily delivered when storing a part of an external conveyance mechanism in a storage part because the storage parts for storing a part of the external conveyance mechanism when delivering the substrate between the external conveyance mechanism and the storage part are provided on a carrying-in side stage and a carrying-out side stage in a substrate conveying part, respectively. Consequently, since the substrate can be delivered even without providing an elevating pin, the total cost can be reduced by just that much, and the processing tact can be shortened. COPYRIGHT: (C)2009,JPO&INPIT
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