| 摘要 |
<p>The resonator (10) comprises a first electrode for generating a region-wise non-homogeneous electric field, a vibration element (12) arranged in the region-wise non-homogeneous electric field, an electric transducer (18) interpreted to vary the electrical potential of the first electrode, a second electrode designed together with the first electrode to produce region-wise non-homogeneous electric field, and a device for detecting a vibration of the vibrating element. The vibration element is formed from a homogeneous material. The resonator (10) comprises a first electrode for generating a region-wise non-homogeneous electric field, a vibration element (12) arranged in the region-wise non-homogeneous electric field, an electric transducer (18) interpreted to vary the electrical potential of the first electrode, a second electrode designed together with the first electrode to produce region-wise non-homogeneous electric field, and a device for detecting a vibration of the vibrating element. The vibration element is formed from a homogeneous material and resiliently displaceable in the direction of the field gradient of the non-homogeneous electric field, comprises electrically insulating material and a material with a dielectric constant of 5-10 and has a resonance frequency of 1 MHz. The vibration element is attached via a first end portion (12a) and a second end portion (12b) to a carrier substrate and is tensile-strained in a vibration section (12c) arranged between the two end sections. The vibration element from the first and/or second electrodes has a distance of more than 0.5 mu m. Independent claims are included for: (1) a sensor; (2) a clock; (3) a method for resonance production by temporal variation of a non-homogeneous electric field in an area of a mechanical vibration element; and (4) a method for the detection and/or measurement of acceleration.</p> |
