METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

摘要

Provided is a method for manufacturing a piezoelectric device comprising a substrate (4), and a vibrating part supported directly or indirectly by the substrate (4) and having a membrane shape or beam shape arranged to the upper side of the substrate (4), the vibrating part including a piezoelectric layer (6), wherein the method includes a step for forming the vibrating part, and a step for carrying out localized heat treatment of an area that includes at least a portion of the vibrating part, to adjust the resonance frequency of the vibrating part.