| 发明名称 |
APPARATUS FOR FORMING AN OPTICAL PATTERN |
| 摘要 |
An apparatus for forming an optical pattern includes a vacuum chamber, a mount on which a substrate to be prepared using a mask is to be supported, a diffusion unit adjacent the mask, spaced apart from the mask by a preset interval, and facing the mask, the diffusion unit to diffuse light incident thereon as uniform surface light and transmit the uniform surface light to the mask, and a light source unit spaced in a lateral direction from the diffusion unit, the light source unit to generate light to be incident on the diffusion unit. |
| 申请公布号 |
US2016215380(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201514929444 |
申请日期 |
2015.11.02 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
CHO Young Suk;KANG Tae Min |
| 分类号 |
C23C14/00;G02B5/10;G02B5/02 |
主分类号 |
C23C14/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for forming an optical pattern, the apparatus comprising:
a vacuum chamber; a mount on which a substrate to be prepared using a mask is to be supported; a diffusion unit adjacent the mount, spaced apart from the mount by a preset interval, and facing the mount, the diffusion unit to diffuse light incident thereon as uniform surface light and transmit the uniform surface light to the mount; and a light source unit spaced in a lateral direction from the diffusion unit, the light source unit to generate light to be incident on the diffusion unit. |
| 地址 |
Yongin-si KR |
