| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation device and light irradiation method that can efficiently implement light irradiation processing without causing stages not to interfere with each other in a twin-stage method.SOLUTION: A light irradiation device comprises: a first stage that has a first work loaded; a second stage that has a second work loaded; a control unit that individually controls a movement of the first stage and the second stage; and a rotation control unit that sets poses of the first stage and second stage to a pose during irradiation of light. Herein, the control unit is configured to control so that: each stage moves at a slower movement speed than a maximum movement speed in an irradiation area; moves in a return passage out of the irradiation area at the maximum speed; and moves in a going passage out of the irradiation area in which an inter-stage distance is shorter than the preset closest distance at a movement speed not below the maximum speed, and further, the rotation control unit makes a segment to a rotation allowance position before the first stage and the second stage reach the irradiation area from respective standby positions a segment capable of a rotation operation while reciprocally moving the segment thereto.SELECTED DRAWING: Figure 1 |
