METHOD OF MANUFACTURING VAPOR DEPOSITION MASK, AND VAPOR DEPOSITION MASK

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition mask that can be made both high in precision and lightweight even when sized large.SOLUTION: There is provided a method of manufacturing a vapor deposition mask by laminating a metal mask provided with slits and a resin mask provided with openings corresponding to a pattern to be manufactured by vapor deposition, the method comprising the processes of: preparing a laminate formed by laminating a base, a metal layer provided to be peelable from the base, and a resin layer in this order; forming a metal mask provided with the slits by depositing metal on the resin layer by using a plating method; forming a resin mask by forming, in the resin layer, openings corresponding to the pattern to be formed by vapor deposition and overlapping with the slits provided to the metal mask; forming through holes corresponding to the openings in the metal layer; and peeling the base from the metal layer having the through holes formed.SELECTED DRAWING: Figure 1