| 摘要 |
PROBLEM TO BE SOLVED: To evaluate an error originated in a substrate in real time. SOLUTION: The system comprises an objective lens 14 for converging the flux of light from a mark 1 which has a step formed on a substrate 2; an image forming optical system 21 which images flux from the objective lens 14; an imaging means 22 for imaging the image of the mark 1 which is imaged by the image-forming optical system 21; a position-detecting means 23 for seeking the position of the mark 1, from the image of the mark 1 which is imaged by the imaging means 22; a focus-position changing means 5 for changing the positioning relation of the optical axis direction of the objective lens 14 between a focus position of the objective lens 14 and the mark 1; and output means 32, 33 for outputting information which can decide whether a position-detecting result is influenced by the error originated in a substrate 2 on the basis of the position-detecting result of the mark 1 with the position-detecting means 23 at a plurality of focus positions changed by the focus position changing means 5. COPYRIGHT: (C)2005,JPO&NCIPI |
