| 摘要 |
PROBLEM TO BE SOLVED: To remove a stray light generating around a beam condensed by a micro lens in an image exposure device composed of a DMD and a micro lens array. SOLUTION: The image exposure device is provided with a DMD 50 wherein a number of micro mirrors for modulating applied lights are arranged two-dimensionally, a light source 66 to apply a light B to the DMD 50, and a micro lens array 55 wherein micro lenses 55a for condensing the lights B from the micro mirrors of the DMD are arranged like an array. In this case, a plurality of masks 59a are provided apart from each other adjacent to the focus position of the micro lens 55a so as to block the stray lights while they are arranged corresponding to the dispersion pattern of the stray light due to the deformed reflection surface of the micro mirror. COPYRIGHT: (C)2005,JPO&NCIPI |
