| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro mirror device that has a wide scanning area in spite of the small size and can be manufactured easily and at low cost. SOLUTION: The micro mirror device can deal with biaxial or greater mirror rotations. In other words, according to the micro mirror device of claim 3, the mirror face is further supported freely turnably at least along a second axis orthogonally crossing a first axis in the center. The upper substrate is provided, on the surface opposing the mirror layer, with a third and a fourth upper electrode which are arranged across a second upper boundary passing through the center of the surface and parallel to the second axis. The lower substrate is provided, on the surface opposing the mirror layer, with a third and a fourth lower electrode which are arranged across a second lower boundary passing through the center of the surface and parallel to the second axis. The mirror face is designed to be rotated along the second axis by applying a voltage to the pair of electrodes situated diagonally with the second axis as a reference. COPYRIGHT: (C)2005,JPO&NCIPI
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