| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for positioning surfaces to be positioned and capable of performing highly accurate positioning without being affected by changes in optical magnification due to environmental changes and highly accurately measuring positions with high resolution at high speed and provide its apparatus. SOLUTION: In the method for positioning surfaces to be positioned through the use of an optical measuring apparatus, a state in which a reflected image is detected at any location in an observation field of view is changed into a state in which it is detected at another location. The ratio of information on the distance traveled by the reflected image before and after the travel on an observation image to the relative distance traveled by a surface to be positioned detected by a travel amount detection means is determined. The amount of travel to a target location of travel of the reflected image to be traveled for positioning, by which the surface to be positioned is to be traveled and which is detected by the travel amount detection means, is determined on the basis of the ratio. The surface to be positioned is traveled by the determined amount of travel in the method for positioning surfaces to be positioned. COPYRIGHT: (C)2007,JPO&INPIT
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