THIN FILM FORMING METHOD AND THIN FILM FORMING APPARATUS

摘要

Provided are a thin film forming method and a thin film forming apparatus for performing such film forming method. In the film forming method, a plurality of pairs of targets to which an alternating current power supply is connected are arranged in parallel, and outputs of the adjacent targets connected to the different alternating current power supplies, among the target pairs arranged in parallel, are compared. When the output potential difference exceeds a prescribed value, the output of the alternating power supply is adjusted and the output potential difference is reduced to the prescribed value or less.