发明名称 不純物拡散層形成組成物、不純物拡散層の製造方法、太陽電池素子の製造方法および太陽電池の製造方法
摘要 <P>PROBLEM TO BE SOLVED: To provide a diffusion layer formation composition, a manufacturing method of a diffusion layer, and a manufacturing method of a solar cell element capable of forming a diffusion layer without causing an internal stress and a warpage in a silicon substrate in a manufacturing step of a solar cell element using the silicon substrate. <P>SOLUTION: An impurity diffusion layer formation composition contains a glass powder including a donor element or an acceptor element and a dispersion medium. An n-type diffusion layer or a p-type diffusion layer and a solar cell element having the n-type diffusion layer or the p-type diffusion layer are manufactured by coating this impurity diffusion layer formation composition on a semiconductor substrate and performing thermal diffusion treatment. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5935254(B2) 申请公布日期 2016.06.15
申请号 JP20110160297 申请日期 2011.07.21
申请人 日立化成株式会社 发明人 織田 明博;吉田 誠人;野尻 剛;町井 洋一;岩室 光則;足立 修一郎;佐藤 鉄也
分类号 H01L21/225;H01L31/068;H01L31/18 主分类号 H01L21/225
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