| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette installation adapter or the like which is capable of exchanging and fitting a plurality of types of cassettes with different lower part shapes to a wafer transfer device easily and at low cost and capable of properly transferring a wafer after the cassette is fitted.SOLUTION: A cassette installation adapter 2 comprises: a base 21 on which a cassette C is placed; a plurality of engage members 22 which are fitted on the base in a slidable manner; and adapter identification means 23 for identifying which type of cassette, among a plurality of types of cassettes with different lower part shapes, should be installed in the cassette installation adapter. The base is fitted on a cassette support table 1, and each of the plurality of engage members is engaged with a lower part of a cassette and positioned in accordance with the lower part shape of the cassette so as to block the movement of the cassette on the base.SELECTED DRAWING: Figure 2 |
