| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently improve the accuracy of measuring sheet resistance.SOLUTION: The sheet resistance measurement device comprises: a probe unit 2 having a first supply probe (Ps1), second supply probes (Ps2a-Ps2h), first detection probes (Pd1a-Pd1g), and second detection probes (Pd2a-Pd2i) that are disposed on the underside (10a) of a base part 10; a detection part for executing a first detection process for detecting potential at a first detection point to be measured with which each of the first detection probes is in contact and a second detection process for detecting potential at a second detection point to be measured with which each of the second detection probes is in contact; and a measurement part for measuring the sheet resistance of a measurement object from each potential. The second supply probes are arranged at a plurality of second supply positions (As2a-As2h), in the third virtual circle C3 of the underside 10a, the number of which is prescribed to be different from the number of first detection probes and the number of second detection probes, and the detection part changes the second supply probes that supply a measurement signal and executes the first detection process and the second detection process multiple times.SELECTED DRAWING: Figure 3 |
