CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To automatically repeat an operation of extracting and transferring a sample piece to a sample piece holder, the sample piece being formed by processing a sample using an ion beam.SOLUTION: A charged particle beam apparatus includes a computer that controls a needle actuating mechanism so as to approach a needle to a sample piece using a template formed from an absorbed current image obtained by irradiating the needle with a charged particle beam and a tip coordinate of the needle acquired from a secondary electron image obtained by irradiating the needle with the charged particle beam.SELECTED DRAWING: Figure 1