Non-line of-sight process for coating complexed shaped structures

摘要

Non-line-of-sight process for coating complexed shaped structures of Si-based substrates with protective barrier layers. The coating process comprises the steps of: providing a complex shaped Si-based substrate; applying at least one barrier layer by at least one of electrophoretic deposition and electrostatic deposition; and densifying the barrier layer at a temperature below the melting point of the substrate.