| 发明名称 |
DIAMOND COMPONENTS FOR QUANTUM IMAGING, SENSING AND INFORMATION PROCESSING DEVICES |
| 摘要 |
A single crystal CVD diamond component comprising: a surface, wherein at least a portion of said surface is formed of as-grown growth face single crystal CVD diamond material which has not been polished or etched and which has a surface roughness Ra of no more than 100 nm; and a layer of NV− defects, said layer of NV− defects being disposed within 1 μm of the surface, said layer of NV− defects having a thickness of no more than 500 nm, and said layer of NV− defects having a concentration of NV− defects of at least 105 NV−/cm2. |
| 申请公布号 |
US2016348277(A1) |
申请公布日期 |
2016.12.01 |
| 申请号 |
US201415036617 |
申请日期 |
2014.11.18 |
| 申请人 |
ELEMENT SIX TECHNOLOGIES LIMITED |
发明人 |
Markham Matthew;Stacey Alastair;Twitchen Daniel |
| 分类号 |
C30B31/22;H01L21/04;C30B29/68;H01L29/16;C30B25/20;C30B29/04 |
主分类号 |
C30B31/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A single crystal chemical vapour deposited (CVD) diamond component comprising:
a surface, wherein at least a portion of said surface is formed of as-grown growth face single crystal CVD diamond material which has not been polished or etched and which has a surface roughness Ra of no more than 100 nm; and a layer of NV− defects, said layer of NV− defects being disposed within 1 μm of the surface, said layer of NV− defects having a thickness of no more than 500 nm, and said layer of NV− defects having a concentration of NV− defects of at least 105NV/cm2. |
| 地址 |
Didcot, Oxfordshire GB |
