ELECTROLYTE DELIVERY AND GENERATION EQUIPMENT

摘要

An apparatus for automatically generating a metal-containing electrolyte (e.g., an electrolyte containing Sn2+ ions and an acid) includes an anolyte chamber configured to house an active anode (e.g., a metallic tin anode), an anolyte, and a sensor (e.g., one or more sensors) measuring a concentration of metal ions in the anolyte; a catholyte chamber configured to house a hydrogen-generating cathode and a catholyte; and a controller having program instructions for processing data from the sensor and for automatically generating an electrolyte having metal ions in a target concentration range in the anolyte chamber. In some embodiments, the apparatus is in communication with an electroplating apparatus and is capable to deliver the generated electrolyte to the electroplating apparatus on demand. In some embodiments, a densitometer and a conductivity meter are together used as sensors, and the apparatus is configured to generate low alpha tin electrolyte containing an acid.

主权项

1. An apparatus for generating an electrolyte containing metal ions, the apparatus comprising:
(a) an anolyte chamber configured to contain an active anode and an anolyte, wherein the apparatus is configured to electrochemically dissolve the active anode into the anolyte, and to thereby form the electrolyte containing metal ions, wherein the anolyte chamber comprises:
(i) an inlet for receiving a fluid;(ii) an outlet for removing the anolyte; and(iii) one or more sensors configured for measuring a concentration of metal ions in the anolyte; (b) a first catholyte chamber separated from the anolyte chamber by a first anion permeable membrane, wherein the first catholyte chamber is configured to contain a first catholyte; (c) a second catholyte chamber configured to contain a cathode and a second catholyte, wherein the second catholyte chamber is separated from the first catholyte chamber by a second anion permeable membrane.