HYBRID CERAMIC SHOWERHEAD

摘要

Various implementations of hybrid ceramic faceplates for substrate processing showerheads are provided. The hybrid ceramic showerhead faceplates may include an electrode embedded within the ceramic material of the faceplate, as well as a pattern of through-holes. The electrode may be fully encapsulated within the ceramic material with respect to the through-holes. In some implementations, a heater element may also be embedded within the hybrid ceramic showerhead faceplate. A DC voltage source may be electrically connected with the hybrid ceramic showerhead faceplate during use. The hybrid ceramic faceplates may be easily removable from the substrate processing showerheads for easy cleaning and faceplate replacement.

主权项

1. A gas distributor comprising:
a ceramic faceplate for a substrate processing showerhead of a processing chamber, the ceramic faceplate including a first pattern of first through-holes; an electrode including a second pattern of second through-holes; and a plurality of standoffs, wherein the standoffs are electrically conductive and each electroconductively coupled with the electrode, wherein:
the electrode is embedded within the ceramic faceplate,the second pattern matches the first pattern,the first pattern includes all of the through-holes through which processing gases flow through the ceramic faceplate when the ceramic faceplate is installed in the substrate processing showerhead of the processing chamber,each second through-hole is larger in size than the corresponding first through-hole,the ceramic faceplate is circular and has a plurality of blind holes,each blind hole terminates at the electrode and is occupied by a different one of the standoffs, andeach standoff has a surface facing away from the electrode that is exposed and not covered by ceramic material of the ceramic faceplate.