发明名称 |
DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF |
摘要 |
A deposition system, and a method of operation thereof, includes: a cathode; a shroud below the cathode; a rotating shield below the cathode for exposing the cathode through the shroud and through a shield hole of the rotating shield; and a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier. |
申请公布号 |
SG11201607256P(A) |
申请公布日期 |
2016.10.28 |
申请号 |
SG11201607256P |
申请日期 |
2015.03.30 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SUBRAMANI, ANANTHA K.;JADHAV, DEEPAK;GOEL, ASHISH;WU, HANBING;KOTHNUR, PRASHANTH;CHING, CHI HONG |
分类号 |
H01L21/203 |
主分类号 |
H01L21/203 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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