| 摘要 |
A pressurized ejector deposition device and method for organic material steam, comprising: a mixing equalizing chamber (9), an organic material steam source (8), a high-pressure carrier gas supply device (10), a piezoelectric supercharging device (12) and a nozzle (13). Both the organic material steam source (8) and the high-pressure carrier gas supply device (10) are connected to the mixing equalizing chamber (9). An outlet of the mixing equalizing chamber (9) is connected to the nozzle (13) via the piezoelectric supercharging device (12). Organic material steam in the organic material steam source (8) enters the mixing equalizing chamber (9), and the organic material steam and introduced carrier gas mix to generate a current-carrying gas mixture. Under the action of the piezoelectric supercharging device (12), the current-carrying gas mixture passes through the piezoelectric supercharging device (12), is jetted at a high speed from the nozzle (13), and forms a highly collimating jet flow. The jet flow impacts a deposited substrate (3), and the deposited substrate (3) selectively and physically absorbs organic material molecules while the carrier gas escapes, thereby forming an organic film having a high resolution. Also disclosed is a pressurized ejector deposition method for the organic material steam. |
