| 发明名称 |
APPARATUS OF ALLIGNING SUBSTRATE AND METHOD OF ALLIGNING SUBSTRATE |
| 摘要 |
An apparatus and a method for aligning a substrate are disclosed. In one aspect, the substrate aligning apparatus includes a stage configured to support a plurality of substrates, a supporting pin placed in the stage to support the substrates and an alignment clamp configured to respectively move each of the substrates to align the substrates. The alignment clamp can respectively align at least two of the substrates with reference, to an alignment reference position as a two-dimensional coordinate system which includes a first axis and a second axis crossing the first axis and is set on an imaginary plane by the first and second axes. |
| 申请公布号 |
US2016356597(A1) |
申请公布日期 |
2016.12.08 |
| 申请号 |
US201514935207 |
申请日期 |
2015.11.06 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
Park Jin Wan;Park Ji Hwan |
| 分类号 |
G01B11/27;H01L21/687;H01L21/68;H01L21/67;H01L21/66 |
主分类号 |
G01B11/27 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate aligning apparatus comprising:
a stage configured to support a plurality of substrates; a supporting pin placed in the stage to support the substrates; and an alignment clamp configured to respectively move each of the substrates to align the substrates, wherein the alignment clamp is further configured to respectively align at least two of the substrates with reference to an alignment reference position as a two-dimensional coordinate system which includes a first axis and a second axis crossing the first axis and is set on an imaginary plane by the first and second axes. |
| 地址 |
Yongin-si KR |
