发明名称 Chemical species detection including a multisection laser for improved process monitoring
摘要 A gas species monitoring system includes a laser system, where the laser system includes a multisection DBR laser, and a plurality of measurement points disposed at different locations within the system. The laser system is configured to selectively deliver a laser beam from the multisection DBR laser to each measurement point within the system to determine a concentration of at least one gas species at each measurement point. A chemical detection grid is aligned with the ITU-GRID to facilitate use of a multisection DRB laser that operates within one or more of the defined bands of the ITU-GRID.
申请公布号 US2006124852(A1) 申请公布日期 2006.06.15
申请号 US20050211073 申请日期 2005.08.25
申请人 VON DRASEK WILLIAM A 发明人 VON DRASEK WILLIAM A.
分类号 G01J5/02 主分类号 G01J5/02
代理机构 代理人
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