发明名称 PROCESS FOR PRODUCING A BACK JUNCTION SOLAR CELL
摘要 The present invention can finely arrange p + -type diffusion layers and n + -type diffusion layers. A p + -type diffusion layer 2 and an n + -type diffusion layer 3 are simultaneously formed on a back surface 1a of a semiconductor substrate 1 in a state that the p + -type diffusion layer 2 and the n + -type diffusion layer 3 are arranged close to each other, and a back surface 1a side of the semiconductor substrate 1 on which outer end portions of the p + -type diffusion layers 2 and the n + -type diffusion layers 3 are brought into contact with each other is removed thus separating the p + -type diffusion layer 2 and the n + -type diffusion layer 3 from each other and hence, the p + -type diffusion layer 2 and the n + -type diffusion layer 3 can be separately arranged in a state that the p + -type diffusion layer 2 and the n + -type diffusion layer 3 are arranged close to each other.
申请公布号 EP1835548(A1) 申请公布日期 2007.09.19
申请号 EP20050795521 申请日期 2005.10.21
申请人 NAOETSU ELECTRONICS CO., LTD.;SHIN-ETSU CHEMICAL COMPANY, LTD. 发明人 ONISHI, TSUTOMU;AKATSUKA, TAKESHI;IGARASHI, SHUNICHI
分类号 H01L31/18;H01L31/0224;H01L31/0352;H01L31/068 主分类号 H01L31/18
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