| 摘要 |
The invention provides a device for electrochemically depositing a material on at least one side of a plate-shaped substrate having a circumferential edge, said device comprising an electrolytic bath with an electrolytic solution therein, which electrolytic bath has at least one inlet opening and at least one outlet opening for feeding and discharging the electrolytic solution to and from the electrolytic bath, respectively, a substrate holder for positioning the substrate in the electrolytic bath such that the substrate is connected as a cathode, an anode arranged in the electrolytic solution opposite the substrate, and a screening member between the anode and the substrate for screening the substrate locally at the circumferential edge of the substrate. The screening member is tubular is shape, while at least one flow passage is provided in the wall of the tubular screening member, which passage can serve as the inlet opening or as the outlet opening for the electrolytic solution. |
