THE COATING PERFORMANCE TEST EQUIPMENTS

摘要

A coating performance evaluation apparatus is provided to place a plurality of specimens in a tray so as to perform measurement under the same condition. A coating performance evaluation apparatus comprises a chamber(20) with a hollow cavity, a chemical vessel(30) which is installed on the bottom of the chamber to contain etchant solution having acidity, a tray(40) installed in the middle of the chamber, a plasma generating device(50) installed on the top of the chamber, and a heating unit creating high temperature in the chamber. The tray has a through hole so that the coated surface of a specimen(90) is exposed to the etchant gas.