Phase Plate, Method of Fabricating Same, and Electron Microscope

摘要

A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.

主权项

1. A phase plate for use in an electron microscope, said phase plate comprising:
a phase control layer provided with a through-hole and having a first surface and a second surface on the opposite side of the first surface; and at least one electrically conductive layer formed on at least one of the first and second surfaces of the phase control layer and covering and closing off the through-hole; wherein the phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.