| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a compact projection aligner and reduction in cost thereof by preventing an increase in size of a lens. <P>SOLUTION: The projection aligner is provided with an illumination optical system for illuminating a reticle, a holding means for holding the reticle, and a projection optical system for projecting the image of the reticle illuminated by the illumination means on a substrate. The projection aligner is provided with a means for filling a liquid into at least any one of a space between the reticle and the illumination means and a space between the reticle and the projection optical system. <P>COPYRIGHT: (C)2007,JPO&INPIT |
