发明名称 ZINC OXIDE BASED TRANSPARENT ELECTRIC CONDUCTOR, SPUTTERING TARGET FOR FORMING OF THE CONDUCTOR AND PROCESS FOR PRODUCING THE TARGET
摘要 A zinc oxide based transparent electric conductor composed mainly of zinc oxide (ZnO) and containing an element being an n-type dopant for the zinc oxide, characterized in that a metal whose parameter P indicating a wetting characteristic with zinc oxide (P=(G+Hmix)/RT, wherein G is the Gibbs free energy of the metal at temperature T; Hmix is the mixing enthalpy of zinc oxide and metal at temperature T; R is gas constant, and T is temperature) is 6 or below, the metal exhibiting a resistivity lower than that of the zinc oxide loaded with the n-type dopant, is contained in an amount of 0.05 to 2.0 atom.% based on all the metal atoms. In the development of transparent electric conductor not having raw material indium (In) that is expensive and feared for resource depletion, crossing the bounds of the conventional development technique according to single doping method, it is intended to indicate the preference guideline for secondary additive material effective for conversion to low resistivity and further the particular type of material and the range of appropriate concentration and to accordingly provide a transparent electric conductor with low resistivity.
申请公布号 WO2008023482(A1) 申请公布日期 2008.02.28
申请号 WO2007JP60487 申请日期 2007.05.23
申请人 NIPPON MINING & METALS CO., LTD.;IKISAWA, MASAKATSU;YAHAGI, MASATAKA 发明人 IKISAWA, MASAKATSU;YAHAGI, MASATAKA
分类号 H01B1/08;C04B35/453;C23C14/08;C23C14/34;H01B5/14 主分类号 H01B1/08
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