发明名称 IMAGE CORRECTION METHOD AND APPARATUS FOR USE IN PATTERN INSPECTION SYSTEM
摘要 A technique for correcting an image by using frequency division images and decomposition images corresponding in number to reference points is disclosed. An image correction apparatus includes an image divider which divides an inspection reference image into frequency regions to form frequency division images, a decomposition image generator for defining reference points at several locations within at least one frequency division image and for applying weighting with each reference point as a reference to thereby generate decomposition images corresponding in number to the reference points, a model parameter identifier for identifying a model parameter by using 2D linear prediction models of an image being tested, the decomposition images and a frequency division image which is out of the generation of decomposition images, and a model image generator for using the model parameter to generate a model image. An image inspection apparatus using the correction apparatus and an image correction method are also disclosed.
申请公布号 US2008050008(A1) 申请公布日期 2008.02.28
申请号 US20060567550 申请日期 2006.12.06
申请人 ADVANCED MASK INSPECTION TECHNOLOGY INC. 发明人 OAKI JUNJI
分类号 G06K9/00;G01N21/956;G03F1/84;G06K9/62;G06T1/00 主分类号 G06K9/00
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