OXIME SULFONATES AND THE USE THEROF AS LATENT ACIDS

摘要

Compounds of the formula (I), (Il) or (III), wherein R₁ is for example C₁-C₁₈alkylsulfonyl, C₁-C₁₀haloalkylsulfonyl, camphorylsulfonyl, phenyl-C₁-C₃alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthrylsulfonyl, phenanthrylsulfonyl or heteroarylsulfonyl, R'₁ is for example phenylenedisulfonyl, R₂ is for example CN, C₁-C₁₀haloalkyl or C₁-C₁₀haloalkyl which is substituted by (IV); Ar₁ is for example phenyl optinally substituted by a group of formula (IV); Ar'₁ is for example phenylene which optionally is substituted by a group of formula (IV); A₁, A₂ and A₃ independently of each other are for example hydrogen, halogen, CN, or C₁-C₁₈alkyl; D₂ is for example a direct bond, O, (CO)O, (CO)S, SO₂, OSO₂ or C₁-C₁₈alkylene; or A₃ and D₂ together form C₃-C₃₀cycloalkenyl; or A₂ and D₂ together with the carbon of the ethylenically unsaturated double bond to which they are attached form C₃-C₃₀cycloalkyl; D₃ and D₄ for example independently of each other are a direct bond, O, S, C₁-C₁₈alkylene or C₃-C₃₀cycloalkylene provided that at least one of the radicals R₂, Ar₁ or Ar₁' comprises a group of the formula (IV); are suitable as photolatent acid donors and for the preparation of corresponding polymers to be employed in chemically amplified photoresists.