发明名称 SENSOR ARRAY HAVING A SUBSTRATE AND A HOUSING, AND METHOD FOR MANUFACTURING A SENSOR ARRAY
摘要 In a sensor array having a substrate and a housing, and in a method for manufacturing a sensor array are proposed, the housing substantially completely surrounds the substrate in a first substrate area, the housing is provided in a second substrate area at least partly open via an opening, and the second substrate area is provided protruding from the housing in the area of the opening.
申请公布号 US2009072333(A1) 申请公布日期 2009.03.19
申请号 US20060063785 申请日期 2006.07.07
申请人 HAAG FRIEDER;BOES THOMAS-ACHIM 发明人 HAAG FRIEDER;BOES THOMAS-ACHIM
分类号 H01L29/84;B81C99/00;H01L21/50 主分类号 H01L29/84
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