发明名称 |
SENSOR ARRAY HAVING A SUBSTRATE AND A HOUSING, AND METHOD FOR MANUFACTURING A SENSOR ARRAY |
摘要 |
In a sensor array having a substrate and a housing, and in a method for manufacturing a sensor array are proposed, the housing substantially completely surrounds the substrate in a first substrate area, the housing is provided in a second substrate area at least partly open via an opening, and the second substrate area is provided protruding from the housing in the area of the opening.
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申请公布号 |
US2009072333(A1) |
申请公布日期 |
2009.03.19 |
申请号 |
US20060063785 |
申请日期 |
2006.07.07 |
申请人 |
HAAG FRIEDER;BOES THOMAS-ACHIM |
发明人 |
HAAG FRIEDER;BOES THOMAS-ACHIM |
分类号 |
H01L29/84;B81C99/00;H01L21/50 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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