发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 The adhesive property of the mold resin exposed to the ball face side of a semiconductor package and under-filling resin is improved, and the manufacturing method of the semiconductor device which can prevent peeling at both interface is obtained. The sputtering step which does sputtering of the ball face side of the semiconductor package whose mold resin in which wax or fatty acid was included exposed to the ball face side by Ar plasma, the step which does flip chip junction of the semiconductor package at wiring substrate upper part after the sputtering step, and the step fills up with under-filling resin between the semiconductor package and the wiring substrate are included.
申请公布号 US2009075425(A1) 申请公布日期 2009.03.19
申请号 US20080268050 申请日期 2008.11.10
申请人 HAYASHI EIJI;SUGIMURA TAKAHIRO 发明人 HAYASHI EIJI;SUGIMURA TAKAHIRO
分类号 H01L21/50 主分类号 H01L21/50
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