| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component, in particular, a display device, formed by using an efficient pattern forming method. SOLUTION: An upper metal film 8 and a contact film 7 are removed by the first etching using the first resist pattern 9 as a mask, in a substrate laminated with a gate insulating film 5, a semiconductor film 6, the contact film 7 and the upper metal film 8, on a gate pattern, a channel part for a data pattern and a transistor is formed to include a drain electrode 10, a source electrode 11, a data terminal 12 and a data wire 13; the second resist pattern 14 is transferred to superimpose, at least one part thereof with the first resist pattern 9 on channel part both sides and to cover the channel part; the semiconductor film 6 is removed by the second etching using the first resist pattern 9 and the second resist pattern 14 as masks, to expose the gate insulating film 5; and the semiconductor film 6 is processed into an island-like shape, according to a manufacturing method for a thin-film transistor. COPYRIGHT: (C)2009,JPO&INPIT |
