SYSTEM AND METHOD FOR AUTOMATIC VIRTUAL METROLOGY

摘要

PURPOSE: A system and a method for automatic virtual metrology are provided to maintain the accuracy of the desired virtual measurement. CONSTITUTION: A first measuring equipment(22a) includes accumulated measured values of a first product and a first real measured values. A first AVM server(30a) collects the accumulated process data set and the accumulated measured value. A model generating server(60) constructs the VM(Virtual Metrology) model set using the accumulated process data set and the accumulated measured value. According to a second process data set, a second process apparatuses produce the second products. A second measuring equipment(22b) measures the second real measured values of the second products. A second AVM server(30b) performs the virtual measurement about the second products using the VM model set.