| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition having a low refractive index, to form a low refractive index film at normal temperature and pressure, and to provide a low refractive index film and anti-reflection film having sufficient mechanical strength.SOLUTION: A low refractive index film, principally made of a silicon oxide composition and containing fluorine, features fluorine content of 8-30 wt.%, uniform distribution of the elemental fluorine in the film, and an elemental fluorine compositional variation within a range of ±2 wt.%. An anti-reflection film has the low refractive index layer formed as a constituent layer.SELECTED DRAWING: Figure 8 |
